Microengineering Technology

Course aim

To introduce modern process technologies for fabrication and simulation of microengineered devices and systems.

Course content

Microelectronics as foundation for microengineering, physical and mechanical properties of silicon, dielectrics and resists, thin film and vacuum techniques, thick film and hybridisation, monolithic technology, lithography and mask making, oxidation, selective doping, wet and dry etching, bulk and surface micromachining, LIGA and micromoulding, packaging, modelling and CAD tools for micro electro mechanical systems, application to sensors, motors, and accelerometers, reliability of micro components.

Textbook(s)

Campbell SA 2004, The Science and Engineering of Microelectronic Fabrication, 2, Oxford

Prerequisite(s)

Common to all relevant programs
Subject Area & Catalogue Number	Course Name
EEET 2018	Analogue Devices and Circuits

Corequisite(s)

Nil

Teaching method

Component	Duration
INTERNAL, MAWSON LAKES
Lecture	2 hours x 13 weeks
Practical	2 hours x 12 weeks
INTERNAL, OFFSHORE, KAPLAN HIGHER EDUCATION - SINGAPORE (INTENSIVE)
Offshore (Lecture/Tutorial)	20 hours x 1 week
Workshop (Compulsory 2 week workshop in Adelaide)	4 hours x 1 day

Note: These components may or may not be scheduled in every study period. Please refer to the timetable for further details.

Assessment

Examination, Practical, Practical Report portfolio, Workshop

Fees

EFTSL*: 0.125
Commonwealth Supported program (Band 2)
To determine the fee for this course as part of a Commonwealth Supported program, go to:
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Fee-paying program for domestic and international students
International students and students undertaking this course as part of a postgraduate fee paying program must refer to the relevant program home page to determine the cost for undertaking this course.

Non-award enrolment
Non-award tuition fees are set by the university. To determine the cost of this course, go to:
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Not all courses are available on all of the above bases, and students must check to ensure that they are permitted to enrol in a particular course.

* Equivalent Full Time Study Load. Please note: all EFTSL values are published and calculated at ten decimal places. Values are displayed to three decimal places for ease of interpretation.