Introduction to Microelectromechanical Systems
Undergraduate
Undergraduate
EEET 4047
Undergraduate
No
013720
4.5
No
School of Engineering
To introduce the topic of microelectromechanical systems (MEMS) and its applications in a wide range of devices and systems, as well as the design and fabrication of these systems.
History of MicroElectroMechanical Systems (MEMS), market for MEMS, basics of microtechnology, lithography and etching, bulk and surface micromachining: subtractive processes (wet and dry etching), additive processes (evaporation, sputtering, epitaxial growth). Fundamental devices and processes, Multi User MEMS Process (MUMPs), SUMMiT: design rules; applications; micro hinges and deployment actuators, CMOS MEMS, cleanroom lab techniques, MicroOptoElectroMechanical Systems (MOEMS), bioMEMS and biomaterials, piezoresistivity; scanning probe microscopy, scaling laws, applications.
Note – conceded and terminating passes will be available for undergraduates taking this course but not for postgraduates.
Kovacs, Gregory T. A. 1998, Micromachined Transducers Sourcebook, WCB McGraw-Hill
Common to all relevant programs | |
---|---|
Subject Area & Catalogue Number | Course Name |
MATH 2021 | Engineering Mathematics 3E |
PHYS 2002 | Physics of Materials and Technology |
IT Physics (or equivalent).
Nil
Component | Duration | ||
---|---|---|---|
INTERNAL, MAWSON LAKES | |||
Lecture | 2 hours x 13 weeks | ||
Tutorial (Cleanroom session) | 1 day x N/A | ||
Tutorial | 1 hour x 12 weeks |
Note: These components may or may not be scheduled in every study period. Please refer to the timetable for further details.
Class Project, Examination, Homework Assignments (2)
EFTSL*: 0.125
Commonwealth Supported program (Band 2)
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Fee-paying program for domestic and international students
International students and students undertaking this course as part of a postgraduate fee paying program must refer to the relevant program home page to determine the cost for undertaking this course.
Non-award enrolment
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* Equivalent Full Time Study Load. Please note: all EFTSL values are published and calculated at ten decimal places. Values are displayed to three decimal places for ease of interpretation.