Introduction to Microelectromechanical Systems

Course aim

To introduce the topic of microelectromechanical systems (MEMS) and its applications in a wide range of devices and systems, as well as the design and fabrication of these systems.

Course content

History of MicroElectroMechanical Systems (MEMS), market for MEMS, basics of microtechnology, lithography and etching, bulk and surface micromachining: subtractive processes (wet and dry etching), additive processes (evaporation, sputtering, epitaxial growth). Fundamental devices and processes, Multi User MEMS Process (MUMPs), SUMMiT: design rules; applications; micro hinges and deployment actuators, CMOS MEMS, cleanroom lab techniques, MicroOptoElectroMechanical Systems (MOEMS), bioMEMS and biomaterials, piezoresistivity; scanning probe microscopy, scaling laws, applications.
Note – conceded and terminating passes will be available for undergraduates taking this course but not for postgraduates.

Textbook(s)

Kovacs, Gregory T. A. 1998, Micromachined Transducers Sourcebook, WCB McGraw-Hill

Prerequisite(s)

Common to all relevant programs
Subject Area & Catalogue Number	Course Name
PHYS 2002	Physics of Materials and Technology
MATH 2021	Engineering Mathematics 3E

IT Physics (or equivalent).

Corequisite(s)

Nil

Teaching method

Component	Duration
INTERNAL, MAWSON LAKES
Lecture	2 hours x 13 weeks
Tutorial (Cleanroom session)	1 day x N/A
Tutorial	1 hour x 12 weeks

Note: These components may or may not be scheduled in every study period. Please refer to the timetable for further details.

Assessment

Class Project, Examination, Homework Assignments (2)

Fees

EFTSL*: 0.125
Commonwealth Supported program (Band 2)
To determine the fee for this course as part of a Commonwealth Supported program, go to:
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Fee-paying program for domestic and international students
International students and students undertaking this course as part of a postgraduate fee paying program must refer to the relevant program home page to determine the cost for undertaking this course.

Non-award enrolment
Non-award tuition fees are set by the university. To determine the cost of this course, go to:
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Not all courses are available on all of the above bases, and students must check to ensure that they are permitted to enrol in a particular course.

* Equivalent Full Time Study Load. Please note: all EFTSL values are published and calculated at ten decimal places. Values are displayed to three decimal places for ease of interpretation.