Microengineering Technology
Course Level Undergraduate
Area/Catalogue
EEET 4061
Course Level
Undergraduate
Offered Externally
No
Course ID
105799
Unit Value
4.5
University-wide elective course
Yes
Timetable/s
This class has not been
timetabled for year 2024.
Course owner
UniSA STEM
Course Alert: This course is no longer available for enrolment
Course aim
To introduce modern process technologies for fabrication and simulation of microengineered devices and systems.
Course content
Microelectronics as foundation for microengineering, physical and mechanical properties of silicon, dielectrics and resists, thin film and vacuum techniques, thick film and hybridisation, monolithic technology, lithography and mask making, oxidation, selective doping, wet and dry etching, bulk and surface micromachining, LIGA and micromoulding, packaging, modelling and CAD tools for micro electro mechanical systems, application to sensors, motors, and accelerometers, reliability of micro components.
Textbook(s)
Campbell SA 2004, The Science and Engineering of Microelectronic Fabrication, 2, Oxford
Prerequisite(s)
| Common to all relevant programs | |
|---|---|
| Subject Area & Catalogue Number | Course Name |
| EEET 2018 | Analogue Devices and Circuits |
Corequisite(s)
Nil
Teaching method
| Component | Duration | ||
|---|---|---|---|
| INTERNAL, MAWSON LAKES | |||
| Lecture | 2 hours x 13 weeks | ||
| Practical | 2 hours x 12 weeks | ||
| INTERNAL, OFFSHORE, KAPLAN HIGHER EDUCATION - SINGAPORE (INTENSIVE) | |||
| Offshore (Lecture/Tutorial) | 20 hours x 1 week | ||
| Workshop (Compulsory 2 week workshop in Adelaide) | 4 hours x 1 day | ||
Note: These components may or may not be scheduled in every study period. Please refer to the timetable for further details.
Assessment
Examination, Practical, Practical Report portfolio, Workshop
Fees
EFTSL*: 0.125
Commonwealth Supported program (Band 2)
To determine the fee for this course as part of a Commonwealth Supported program, go to:
How to determine your Commonwealth Supported course fee. (Opens new window)
Fee-paying program for domestic and international students
International students and students undertaking this course as part of a postgraduate fee paying program must refer to the relevant program home page to determine the cost for undertaking this course.
Non-award enrolment
Non-award tuition fees are set by the university. To determine the cost of this course, go to:
How to determine the relevant non award tuition fee. (Opens new window)
Not all courses are available on all of the above bases, and students must check to ensure that they are permitted to enrol in a particular course.
* Equivalent Full Time Study Load. Please note: all EFTSL values are published and calculated at ten decimal places. Values are displayed to three decimal places for ease of interpretation.
Course Coordinators
Dr Alex Hariz
UniSA STEM
