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Area/Catalogue
EEET 4047

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Course Level
Undergraduate

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Offered Externally
No

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Course ID
013720

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Unit Value
4.5

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University-wide elective course
No

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Timetable/s

This class has not been
timetabled for year 2019.

Course owner

Course owner
School of Engineering

Course aim

To introduce the topic of microelectromechanical systems (MEMS) and its applications in a wide range of devices and systems, as well as the design and fabrication of these systems.

Course content

History of MicroElectroMechanical Systems (MEMS), market for MEMS, basics of microtechnology, lithography and etching, bulk and surface micromachining: subtractive processes (wet and dry etching), additive processes (evaporation, sputtering, epitaxial growth). Fundamental devices and processes, Multi User MEMS Process (MUMPs), SUMMiT: design rules; applications; micro hinges and deployment actuators, CMOS MEMS, cleanroom lab techniques, MicroOptoElectroMechanical Systems (MOEMS), bioMEMS and biomaterials, piezoresistivity; scanning probe microscopy, scaling laws, applications.
Note – conceded and terminating passes will be available for undergraduates taking this course but not for postgraduates.

Textbook(s)

Kovacs, Gregory T. A. 1998, Micromachined Transducers Sourcebook, WCB McGraw-Hill

Prerequisite(s)

Common to all relevant programs
Subject Area & Catalogue Number Course Name
MATH 2021 Engineering Mathematics 3E
PHYS 2002 Physics of Materials and Technology

IT Physics (or equivalent).

Corequisite(s)

Nil

Teaching method

Component Duration
INTERNAL, MAWSON LAKES
Lecture 2 hours x 13 weeks
Tutorial (Cleanroom session) 1 day x N/A
Tutorial 1 hour x 12 weeks

Note: These components may or may not be scheduled in every study period. Please refer to the timetable for further details.


Assessment

Task Length Weighting Duration
INTERNAL, MAWSON LAKES
Homework Assignments (2) 1500 words total 40% N/A
Class Project 1000 words 20% N/A
Examination N/A 40% 2 hours

Fees

EFTSL*: 0.125
Commonwealth Supported program (Band 2)
To determine the fee for this course as part of a Commonwealth Supported program, go to:
How to determine your Commonwealth Supported course fee. (Opens new window)

Fee-paying program for domestic and international students
International students and students undertaking this course as part of a postgraduate fee paying program must refer to the relevant program home page to determine the cost for undertaking this course.

Non-award enrolment
Non-award tuition fees are set by the Division offering the course. To determine the cost of this course, go to:
How to determine the relevant non award tuition fee. (Opens new window)

Not all courses are available on all of the above bases, and students must check to ensure that they are permitted to enrol in a particular course.

* Equivalent Full Time Study Load. Please note all EFTSL values are published and calculated at ten decimal places. Values are displayed to three decimal places for ease of interpretation

Course Coordinators

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